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Identifier 000465716
Title Conductometric gas sensors based on nanostructured metal oxide thin films
Alternative Title Αγωγιμομετρικοί αισθητήρες αερίων βασισμένοι σε νανοδομημένα λεπτά υμένια οξειδίων μετάλλων
Author Τσιχλής, Χρήστος-Παναγιώτης Δ.
Thesis advisor Μπίνας, Βασίλειος
Γκαγκαουδάκης, Εμμανουήλ
Reviewer Γεωργακίλας, Αλέξανδρος
Ηλιόπουλος, Ελευθέριος
Abstract The aim of this master’s thesis is to study the properties and the sensing efficiency of ZnAlO, ZnAl5Ox and ZnAlSiOx thin films to hydrogen and methane gases. In this work, all the sensing thin films were developed with the dc sputtering technique, and they were structurally, morphologically and optically studied with UV-Vis spectroscopy, X-Ray diffraction (XRD), Atomic Force Microscopy (AFM), Energy Dispersive Spectroscopy (EDS) and Scanning Electron Microscopy (SEM) techniques. All sensors were tested for low input voltage in a wide temperature range, from room temperature (RT) to T=400°C. In both the cases of hydrogen and methane gas sensing, the optimal results were retrieved from the upper range of temperatures.
Language English
Subject DC sputtering
Hydrogen
Methane
Μεθάνιο
Οξείδια μετάλλων
Υδρογόνο
Issue date 2024-07-11
Collection   School/Department--School of Sciences and Engineering--Department of Physics--Post-graduate theses
  Type of Work--Post-graduate theses
Permanent Link https://elocus.lib.uoc.gr//dlib/3/a/4/metadata-dlib-1719396209-382459-14920.tkl Bookmark and Share
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