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Identifier 000361110
Title Experimental and theoretical study of 3C-Silicon Carbide nanowire field effect transistors
Alternative Title Πειραματική και θεωρητική μελέτη τρανζίστορ εγκαρσίου πεδίου με βάση νανονήματα καρβιδίου του πυριτίου
Author Ρογδάκης, Κωνσταντίνος Ιω
Thesis advisor Τζανετάκης, Παναγιώτης
Reviewer Bano, Edwige
Ζεκεντές, Κωνσταντίνος
Abstract Recently, the growth and characterization of one-dimensional (1D) nanostructures (nanowires, nanorods, nanotubes) of wide-band-gap semiconductors have been extensively studied due to their potential for applications in nanoelectronics, sensors, batteries, and field emission displays (FEDs). The nanowire (NW) approach allows for a coaxial gate-dielectric channel geometry that is ideal for further downscaling and electrostatic control. Among the wide band-gap materials, 3C-SiC exhibits high values of thermal conductivity, breakdown electric field, electron drift velocity, Young’s modulus and hardness as well as excellent chemical and physical stability. Therefore, 3C-SiC semiconductor nanowires, grown either with top-down or bottom-up techniques, are expected to generate a new family of high-performance nanowire devices as an add-on to mainstream Si technology. This thesis is divided into three main parts. In the first chapter, an introduction to nanowire growth, properties and devices is presented. Our theoretical work follows in chapter two, where a study of 3C-SiC nanowire-based FETs (NWFETs) operating either in ballistic or in dissipative transport regime is indicated. More precisely, we introduce numerical simulations of gate-all-around (GAA) 3C-SiC and Si NWFETs using a full quantum self-consistent Poisson- Schrödinger algorithm within the non-equilibrium Green’s functions (NEGF) formalism. A direct comparison between Si and 3C-SiC device performances sheds some light on the different transport properties of the two materials. In the third and forth chapter, the nanowire growth, the fabrication and the electrical characterization of 3C-SiC NWFETs is presented. The last part of the thesis is devoted to the simulation of the electrical behaviour of the experimental NWFETs (both 3C-SiC and Si NWFETs) by using the Silvaco simulation tool. The accurate fitting of the experimental data, allows us to calculate the nanowire carrier concentration and mobility, and estimate the nanowire/dielectric interface quality as well as to study the effect of carrier concentration lowering, Schottky barriers height at contacts and the interface quality on the device’s performance.
Language English
Subject 3C-Silicon Carbide
Field effect transistors
Nanowires
Κυβικό καρβίδιο του πυριτίου
Νανονήματα
Τρανζίστορ εγκάρσιου πεδίου
Issue date 2010-10-11
Collection   School/Department--School of Sciences and Engineering--Department of Physics--Doctoral theses
  Type of Work--Doctoral theses
Permanent Link https://elocus.lib.uoc.gr//dlib/b/d/6/metadata-dlib-faf28b61333b87b25a9c2948a1f0bc66_1286357722.tkl Bookmark and Share
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