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Title RF signals over field emission currents: a theoretical study for MEMS capacitive switches
Author Michalas, Loukas
Author Konstantinidis, George
Author Papaioannou, George
Publisher Elsevier: Microelectronics Reliability, Vol.138, (2022), 114678
Abstract The existence of (sub)micrometer scale gaps in Micro-Electro-Mechanical-Systems (MEMS) gives rise to field emission currents and this is already considered a reliability issue resulting in device degradation and/or failure. This work aspires to offer another perspective with respect to the field emission related phenomena in Radio Frequency (RF)-MEMS, focusing the attention prior to the failure and emphasizing on a reliability aspect affecting the signal integrity. This stems from the non-linear nature of the field emission currents and instigated during their simultaneous presence with RF signals, particularly of high power. Theoretical calculations reveal that this combination results in the generation of new harmonics in addition to the stimulated one. This effect dependents on the distortion induced in the field emission current by the simultaneous excitation by both the DC and the RF biases. Apart from the applied biases, additional parameters contributing indirectly, such as the operation frequency and the device characteristics are having a major role. These outcomes should therefore be considered when designing (high-power) RF MEMS applications.
Language English
Subject Field emission
RF power
Issue date 2022-09-25
Collection   School/Department--School of Sciences and Engineering--Department of Physics--Publications
  Type of Work--Publications
Notes Associated Projects: • Marie Skłodowska-Curie Action – MSCA-IF-EF-ST No 101032935, PRIME: Predictive Reliability for High Power RF MEMS • Research Create Innovate Call, T1EDK-00329, RADAR: Heterogeneous 3D integration employ disruptive nanotechnologies for the next generation of smart power RF T/R modules
This project has received funding from the European Union’s Horizon 2020 research and innovation programme under the Marie Skłodowska-Curie grant agreement No [101032925], and by the European Regional Development Fund of the European Union and Greek national funds through the Operational Program Competitiveness, Entrepreneurship and Innovation, under the call RESEARCH – CREATE – INNOVATE (project code:T1EDK-00329).
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