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Identifier

000449508

Title

Polycrystalline SiC for brain implantable electrodes

Alternative Title

Πολυκρυσταλλικό SiC για εμφυτεύσιμα ηλεκτρόδια εγκεφάλου

Author

Γαβαλάς, Μιχάλης Γ.

Thesis advisor

Δεληγεώργης, Γεώργιος

Reviewer

Ζεκεντές, Κωνσταντίνος
Γεωργακίλας, Αλέξανδρος
Mercier, Frederic

Collaborator

Institute Polytechnique de Grenoble, Université Grenoble-Alpes, France

Abstract

Silicon carbide (SiC) technology has come to a big interest the last years in research community mainly due to its suitability for high power applications. Nowadays SiC has also high attendance, due to its biocompatibility with organic tissue, for bio-medical research and applications and also for construction of neural interfaces electronic brain chips and microelectrode arrays (MEAs). The present thesis deals with the growth of polycrystalline SiC thin films with Low Pressure Chemical Vapor Deposition (LPCVD) for neural interfaces applications. The study is focusing on low temperature growth below the 1200οC with the use of a cold-wall reactor. In situ doping of the thin films is achieved with ammonia. The deposition is performed on silicon wafers. In situ chloride treatment during the synthesis is shown to be important for the modulation of the deposition rate and overall grown thickness of the deposited thin film. Additionally, we show that dichloride gas also affects the grain size and the overall surface morphology of the film. The grown material is examined by structural, mechanical and electrical characterization methods to determine the grown thickness, crystallinity, surface morphology, residual stress, electrical resistivity and electrochemical charge storage capacity. Microscopic structure is shown to deeply affect the macroscopic properties of the deposited films. Overall characterization shows that the polycrystalline SiC thin films can be able to work properly as the active material for recording-stimulating neural interface.

Language

English

Subject

Cyclic voltammetry

Design of experiment

Electrochemical impedance spectroscopy

Low pressure chemical vapor deposition

Neural interfaces

n-doping

Κυκλική βολταμετρία

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