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Identifier 000401666
Title Study and optimization of field effect transistors based on graphene
Alternative Title Μελέτη και βελτιστοποίηση τρανζίστορ επίδρασης πεδίου από γραφένιο
Author Τριαντόπουλος, Κωνσταντίνος Γ.
Thesis advisor Γεωργακίλας, Αλέξανδρος
Reviewer Χατζόπουλος, Ζαχαρίας
Ηλιόπουλος, Ελευθέριος
Scientific advisor Δεληγεώργης, Γεώργιος
Abstract The purpose of this thesis is the study and optimization of field effect transistors based on graphene. Initially, we studied, palladium (Pd)- graphene contacts and their impact on the transistors performance, the O2 plasma cleaning of the Pd-graphene interface prior to metal deposition for exposure times of 0, 5, 10, 15, 20seconds, and the thermal annealing under air, vacuum and forming gas (H2/N2) conditions after the sample fabrication. The quantities that we extracted through the electrical characterization were the contact and graphene sheet resistance. Following, the second part of this thesis was the study of the hafnium oxide (HfO2) as a gate dielectric. Its characterization was accomplished by fabricating metal-oxide-metal (MOM) structures and its reliability was tested according to the breakdown voltage, leakage current, and the dielectric deposition method. The e-gun evaporation and atomic layer deposition were utilized to deposit the dielectric films. Finally, the thesis was concluded with the study of the graphene field effect transistors as completed device. Dirac diagrams, the output characteristics, the electrical source-drain resistance and transconductance, as were extracted through the electrical characterization, were studied as a function of the gate width, the source-drain distance and gate length.
Language English
Subject Breakdown voltage
Contact resistance
Gfets
Hafnium oxide
Leakage current
Oxygen plasma treatment
Palladium - Graphene Contacts
Sheet resistance
Thermal annealing
Transconductance
Transfer characteristics
Αντίσταση επαφής
Διαγωγιμότητα
Επαφές Παλλαδίου - Γραφενίου
Επιφανειακή αντίσταση
Θερμική ανόπτηση
Καθαρισμός με πλάσμα Οξυγόνου
Οξείδιο του Αφνίου
Ρεύμα διαρροής
Τάση κατάρευσης
Χαρακτηριστικές διάδοσης
Issue date 2016-07-22
Collection   School/Department--School of Sciences and Engineering--Department of Physics--Post-graduate theses
  Type of Work--Post-graduate theses
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