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Identifier

000425719

Title

High resolution optical topography

Alternative Title

Οπτική τοπογραφία υψηλής ανάλυσης

Author

Βλάχου, Σταματίνα

Thesis advisor

Παπάζογλου, Δημήτριος

Reviewer

Κιοσέογλου, Γεώργιος
Άγγλος, Δημήτριος

Abstract

Surface topography is an important aspect of materials science and engineer¬ing research with applications ranging from coatings, tribology, engineered or structured surfaces, to traceology of archaeological surfaces. Using portable, non-invasive high resolution techniques, which enable in-line measurements, is advantageous in many of these applications. Furthermore, the ability to per¬form rapid, high repetition rate measurements is a prerequisite for studying the temporal evolution of minute topographic changes. For this purpose a portable optical profilometer based on interferometry was designed and developed. By studying the spectral modulation, which results from the interference of white light reflected from the sample's surface and a reference surface, we are able to retrieve the surface profile along a line with¬out using any moving parts. As we demonstrate our profilometer can perform measurements, at a rate that exceeds 170 fps, with a resolution better that 10 nm in the longitudinal direction (80 dB dynamic measurement range) and 8 μm in the transverse over a field of 3 mm. By measuring a variety of surfaces we show that spectral interferometry is a powerful, nondestructive technique ideal for performing rapid, high-resolution measurements of both smooth and abrupt surface variations with no restrictions in the surface hardness.

Language

English

Subject

Profilometry

Spectral analysis

White light

interferometry

Λευκό φώς

Προφιλομετρία

Συμβολομετρία

Φασματική ανάλυση

Issue date