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Identifier |
000425719 |
Title |
High resolution optical topography |
Alternative Title |
Οπτική τοπογραφία υψηλής ανάλυσης |
Author
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Βλάχου, Σταματίνα
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Thesis advisor
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Παπάζογλου, Δημήτριος
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Reviewer
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Κιοσέογλου, Γεώργιος
Άγγλος, Δημήτριος
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Abstract |
Surface topography is an important aspect of materials science and engineer¬ing research with applications ranging from coatings, tribology, engineered or structured surfaces, to traceology of archaeological surfaces. Using portable, non-invasive high resolution techniques, which enable in-line measurements, is advantageous in many of these applications. Furthermore, the ability to per¬form rapid, high repetition rate measurements is a prerequisite for studying the temporal evolution of minute topographic changes.
For this purpose a portable optical profilometer based on interferometry was designed and developed. By studying the spectral modulation, which results from the interference of white light reflected from the sample's surface and a reference surface, we are able to retrieve the surface profile along a line with¬out using any moving parts. As we demonstrate our profilometer can perform measurements, at a rate that exceeds 170 fps, with a resolution better that 10 nm in the longitudinal direction (80 dB dynamic measurement range) and 8 μm in the transverse over a field of 3 mm. By measuring a variety of surfaces we show that spectral interferometry is a powerful, nondestructive technique ideal for performing rapid, high-resolution measurements of both smooth and abrupt surface variations with no restrictions in the surface hardness.
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Language |
English |
Subject |
Profilometry |
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Spectral analysis |
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White light |
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interferometry |
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Λευκό φώς |
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Προφιλομετρία |
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Συμβολομετρία |
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Φασματική ανάλυση |
Issue date |
2019-11-22 |
Collection
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School/Department--School of Sciences and Engineering--Department of Materials Science and Technology--Post-graduate theses
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Type of Work--Post-graduate theses
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Permanent Link |
https://elocus.lib.uoc.gr//dlib/2/6/8/metadata-dlib-1573108697-502327-19025.tkl
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Views |
284 |