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Identifier |
000449508 |
Title |
Polycrystalline SiC for brain implantable electrodes |
Alternative Title |
Πολυκρυσταλλικό SiC για εμφυτεύσιμα ηλεκτρόδια εγκεφάλου |
Author
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Γαβαλάς, Μιχάλης Γ.
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Thesis advisor
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Δεληγεώργης, Γεώργιος
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Reviewer
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Ζεκεντές, Κωνσταντίνος
Γεωργακίλας, Αλέξανδρος
Mercier, Frederic
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Collaborator
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Institute Polytechnique de Grenoble, Université Grenoble-Alpes, France
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Abstract |
Silicon carbide (SiC) technology has come to a big interest the last years in research
community mainly due to its suitability for high power applications. Nowadays SiC has also
high attendance, due to its biocompatibility with organic tissue, for bio-medical research and
applications and also for construction of neural interfaces electronic brain chips and microelectrode arrays (MEAs).
The present thesis deals with the growth of polycrystalline SiC thin films with Low
Pressure Chemical Vapor Deposition (LPCVD) for neural interfaces applications. The study
is focusing on low temperature growth below the 1200οC with the use of a cold-wall reactor.
In situ doping of the thin films is achieved with ammonia. The deposition is performed on
silicon wafers. In situ chloride treatment during the synthesis is shown to be important for the
modulation of the deposition rate and overall grown thickness of the deposited thin film.
Additionally, we show that dichloride gas also affects the grain size and the overall surface
morphology of the film.
The grown material is examined by structural, mechanical and electrical
characterization methods to determine the grown thickness, crystallinity, surface morphology,
residual stress, electrical resistivity and electrochemical charge storage capacity. Microscopic
structure is shown to deeply affect the macroscopic properties of the deposited films. Overall
characterization shows that the polycrystalline SiC thin films can be able to work properly as
the active material for recording-stimulating neural interface.
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Language |
English |
Subject |
Cyclic voltammetry |
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Design of experiment |
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Electrochemical impedance spectroscopy |
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Low pressure chemical vapor deposition |
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Neural interfaces |
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n-doping |
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Κυκλική βολταμετρία |
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Νευρο-διεπαφές |
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Σχεδιασμός πειραμάτων |
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Φασματοσκοπία ηλεκτροχημικής εμπέδισης |
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Χημική εναπόθεση ατμών |
Issue date |
2022-07-22 |
Collection
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School/Department--School of Sciences and Engineering--Department of Physics--Post-graduate theses
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Type of Work--Post-graduate theses
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Permanent Link |
https://elocus.lib.uoc.gr//dlib/5/a/f/metadata-dlib-1657006261-192541-25239.tkl
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Views |
416 |